The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
Aug. 04, 1999
Günter Bräuer, Freigericht, DE;
Hermann Kloberdanz, Linsengericht, DE;
Hans-Georg Lotz, Gründau, DE;
Jochen Schneider, Messel, DE;
Alfons Zöller, Bad Soden-Salmünster, DE;
Harro Hagedorn, Frankfurt, DE;
Michael König, Frankfurt, DE;
Jürgen Meinel, Langen, DE;
Götz Teschner, Dresden, DE;
Leybold Systems GmbH, Hanau, DE;
Abstract
In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (,) and with a loading and an unloading station (,or,), two vacuum chambers (,) are provided with several coating stations (,or,to,), directly next to one another, wherein a rotatable transport arm (,or,) is accommodated in each of the two chambers (,), and the transport planes of the two transport arms (,) are aligned with one another. In the separation area of the two chambers (,), an air lock is provided with a corresponding transfer apparatus (,) with two transport arms (,), whose rotary plate (,) is provided with substrate storage unit (,) and projects about halfway into one chamber (,) and halfway into the other chamber (,), wherein one chamber (,) has both the loading as well as the unloading station (,or,).