The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2001
Filed:
Dec. 20, 1999
Applicant:
Inventor:
Woo-Seok Yang, Ichon-shi, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A method for fabricating a ferroelectric capacitor in a ferroelectric memory device includes the steps of forming a first conductive layer on a semiconductor structure prepared for a formation of ferroelectric capacitor, forming a first ferroelectric layer on said first conductive layer, carrying out a rapid thermal annealing for nucleation in said ferroelectric layer, forming a second conductive layer on said ferroelectric layer, and carrying out a thermal treatment for a grain growth in said ferroelectric layer, thereby the interface characteristics are improved, reducing leakage currents and preventing a peeling phenomenon during a following etching process.