The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2001
Filed:
Nov. 25, 1998
Oleg Siniaguine, San Jose, CA (US);
Iskander Tokmouline, New Fairfield, CT (US);
Ipec Precison, Inc., Bethel, CT (US);
Abstract
A method for treating an article with a plasma jet is disclosed. The method involves rotating an article (,) with a surface (,) to be treated about an axis (Ha), wherein the rotation defines a rotation radius extending from the axis. The article surface is contacted with the plasma jet (,) to form a plasma jet footprint (,) having a predetermined dimension on the article surface. The plasma jet footprint is moved along the rotation radius in the radial direction according to a velocity profile along the rotation radius so as to apply heat to the article surface to obtain a desired temperature distribution profile on the article surface along the rotation radius. The method provides a means for controlling the temperature of the article uniformly in a temperature range from about 30° C. and 1200° C. to allow different treatment applications to be performed on the article. The control of article temperature as described allows for uniform treatment processes, such as polymer ablation, etching, deposition and thermal treatment, of the article material itself by injecting different gasses into the plasma jet.