The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2001
Filed:
May. 26, 2000
Masahiro Nambu, Omiya, JP;
Aera Japan Ltd., Tokyo, JP;
Abstract
An exhauster pressure control system capable of keeping the gas pressure constant regardless of variation in the flow rate of the gas to be controlled. An inlet port,and an outlet port,are formed in a main body,and a spool,is held against sliding surfaces,and,by a spring,. A pilot chamber,is located below the spool,and an internal pressure of the pilot chamber is held above a gas pressure at the inlet port,. A pressure sensor S to detect the gas pressure at the inlet port,, a control valve V to supply regulating gas to the pilot chamber,and a control circuit C to drive the control valve V according to an output of the pressure sensor are provided outside the main body,, wherein the gas pressure at the inlet port,as detected by the pressure sensor S is fed back to the control circuit C, thereby actuating the control valve V to supply regulating gas to the pilot chamber.