The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2001
Filed:
Apr. 01, 1999
Applicant:
Inventors:
Didier Maillefer, Belmont sur Lausanne, CH;
Philippe Renaud, Preverenges, CH;
Assignee:
Westonbridge International Limited, Dublin, IE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 ; F16K 1/514 ; F04B 4/314 ;
U.S. Cl.
CPC ...
C23F 1/00 ; F16K 1/514 ; F04B 4/314 ;
Abstract
The invention relates to a micro-machined fluid-flow device (,) comprising a substrate (,) possessing a flow duct (,), a deformable thin layer (,) such a pump membrane or a valve-forming membrane. According to the invention, the thin layer (,) is a rolled metal sheet, preferably made of titanium, and connected to the substrate (,) in the zone (,) overlapping the flow duct, by an anodic bonding. The invention is applicable to making a valve.