The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Sep. 04, 1998
Sung-geun Kim, Kyonggi-do, KR;
Tae-hyung Kim, Kyonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A method for controlling equipment in a semiconductor fabrication system is provided. A host computer automatically receives actual data indicative of an actual state of a unit of equipment for fabricating semiconductor devices. The computer retrieves from a data base stored data indicative of a stored state of the unit. A state change is computed by comparing the actual data with the stored data and the state change is checked against a predetermined threshold. If the state change exceeds the threshold, the data base is updated by storing the actual data, and operation of the equipment is modified. If the state change does not exceed the threshold, the method returns to receiving actual data.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile