The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Mar. 06, 2000
Ulrich Kaczynski, Bad Nauheim, DE;
Roland Hedrich, Ehringshausen, DE;
Leica Microsystems Wetzlar GmbH, Wetzlar, DE;
Abstract
The invention relates to an inspection microscope for the semiconductor industry. The microscope stand consists of a foot (,), a pillar (,) and a crosshead (,). In order to facilitate unobstructed feeding of samples from the back part of the microscope stand, the pillar (,) is mounted laterally next to the back end of the foot (,) and the crosshead (,) arranged thereon when seen from the front. This makes it possible to save space and avoid adaptations when integrating the microscope stand into the clusters in the test area of the semiconductor industry and to feed test objects directly from the back of the microscope stage (,). In an especially advantageous construction of the stand, the inspection microscope is particularly suitable for examining large-surface objects (e.g. flat screens or 400 nm wafers).