The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 2001

Filed:

Aug. 21, 1998
Applicant:
Inventors:

Mau-Song Chou, Rancho Palos Verdes, CA (US);

Richard A. Chodzko, Rancho Palos Verdes, CA (US);

L. Suzanne Casement, Fountain Valley, CA (US);

Jonathan W. Arenberg, Santa Monica, CA (US);

Assignee:

TRW Inc., Redondo Beach, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/188 ;
U.S. Cl.
CPC ...
G01N 2/188 ;
Abstract

A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in a uniform manner at an incident angle. An infrared camera collects a portion of the infrared light which is reflected from the substrate. An image is created from the collected light which includes indicia of the defect. The image is examined as the incident angle is varied for changes in the appearance of the indicia.


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