The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Sep. 09, 1999
Oliver Schatz, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A pressure sensor is based, in part, on the piezoresistive effect. In this, a pressure acting from outside effects a deformation of a resistor, arranged on a membrane, whose resistance changes as a result of that deformation. Since this resistor reacts with similar sensitivity to a deformation resulting from an internal mechanical interference stress, an arrangement is proposed which, with the aid of a compensation resistor, abolishes the effect of the internal mechanical interference stress. This arrangement serves, among other purposes, to compensate for temperature hystereses in integrated sensors, that hysteresis being caused principally by metallization planes in the pressure sensor and by temperature-related creep thereof.