The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Oct. 30, 1998
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
An simlified optical configuration is acheved and, a direction discrimination function and a high resolving detection function are performed by one light receiving section. A TE mode emitted from an optical waveguide section,transmits through a beam splitter,and is guided to a measurement optical path. A TM mode emitted from the optical waveguide is reflected by the beam splitter,and is guided to a reference optical path. First and second ¼ wave plates,and,are inserted in the respective optical paths, and the TE and TM modes are acted by a ½ wave plate while travelling forward and backward on the reference and measurement optical paths. A reference light (TM mode) is reflected by a reference reflection section,and transmits through the beam splitter section,A measurement light (TE mode) is reflected by a measurement reflection section,and is reflected by the beam splitter section,By a polarization member,only direction components of the polarization member,are extracted from the TM and TE modes, and both waves interfere, whereby a displacement is measured by a displacement measurement section