The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Jan. 08, 1999
Applicant:
Inventor:
Takahiro Kono, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/348 ;
U.S. Cl.
CPC ...
H01L 2/348 ;
Abstract
An interlayer insulation film is formed on a semiconductor substrate. A wiring is formed on a part of the surface area of the interlayer insulation film. This wiring has a laminated structure including two or more layers. That is, the wiring includes an underlayer or a first conductive layer which is made of Ta in an a phase, and an overlayer or a second conductive layer which is made of an Al alloy.