The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Sep. 22, 1998
Applicant:
Inventors:
Hans Wilfried Peter Koops, Ober-Ramstadt, DE;
Sergey Babine, Griesheim, DE;
Gerold Dahm, Erlenbach, DE;
Alexey Holopkin, Moscow, RU;
Assignee:
Deutsche Telekom AG, Bonn, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/26 ;
U.S. Cl.
CPC ...
G03F 7/26 ;
Abstract
Three-dimensional, patterned surfaces, which were produced by dry-etching technology and have zones with different degrees of polymerization, are subjected to a time-limited dry-etching process in fluorine-containing plasma, In this context, an ablation process is used, which proceeds as a function of time, from incompletely polymerized material to completely polymerized material. Weakly polymerized regions, in particular those resulting from the proximity effect, may be removed.