The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Apr. 05, 1999
Applicant:
Inventor:
John Paul Drake, Lambourn, GB;
Assignee:
Bookham Technology PLC, , GB;
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/30 ;
U.S. Cl.
CPC ...
G02B 6/30 ;
Abstract
A process for treating a waveguide structure which comprises a silicon substrate with an integrally formed rib waveguide is described. The waveguide has an end portion with a facet, the end portion overhanging the silicon substrate and having an oxide layer on its underside protruding from the facet of the waveguide. A nitride layer extends over the upper surface of the waveguide and the facet. The treatment process involves etching the oxide layer from the underside, growing a new oxide layer, etching the nitride layer and then depositing a new nitride layer.