The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Jan. 03, 2000
Applicant:
Inventor:
Gregory S. Etherington, Cedar Creek, TX (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 2/112 ; H01L 2/166 ;
U.S. Cl.
CPC ...
C25D 2/112 ; H01L 2/166 ;
Abstract
A substrate (,) is placed into a plating bath (,), a current in the bath is measured, and a film (,) is plated onto the substrate (,). In one embodiment the current is measured using a sensing array (,) positioned within the bath, and the measurement is used to control a plating deposition parameter. In an alternative embodiment the current is measured using the sensing array (,) and a characteristic of the plated film is controlled using a corresponding control array (,) also positioned within the plating bath (,).