The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Jun. 13, 2000
Applicant:
Inventors:
Fusaoki Uchikawa, Hyogo, JP;
Shigeru Matsuno, Hyogo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/640 ;
U.S. Cl.
CPC ...
C23C 1/640 ;
Abstract
A source material for chemical vapor deposition of a lead zirconate titanate ferroelectric thin film, the source material including a solution of organometallic compounds containing lead, zirconium, and titanium dissolved in solvent including tetrahydrofuran.
Uchikawa, Fusaoki. (2001). Chemical vapor deposition source for depositing lead zirconate titanate film (U.S. Patent No. 6231658). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6231658
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile