The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2001

Filed:

May. 22, 1998
Applicant:
Inventors:

Kenichi Mitsumori, Miyagi-ken, JP;

Yasuhiko Kasama, Miyagi-ken, JP;

Akira Abe, Miyagi-ken, JP;

Oh Eui Yeol, Kyongki-Do, KR;

Tadahiro Ohmi, Miyagi-ken, JP;

Takayuki Imaoka, Tokyo, JP;

Masayuki Toda, Yamagata-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 ;
U.S. Cl.
CPC ...
B08B 3/12 ;
Abstract

The wet treatment liquid feed nozzle of the invention comprises an introducing path,having an introducing port,a discharging path,having a discharging port,a crossing section,formed by causing the introducing path,and the discharging path,to cross at the other ends thereof, a nozzle assembly,having an opening section,opening to an object to be treated,provided at the crossing section,and pressure control means,for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated,and the atmospheric pressure provided at least on the discharging path,side so that the wet treatment liquid having been in contact with the object to be treated,via the opening section,does not flow to outside the discharging path


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