The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Dec. 10, 1998
Applicant:
Inventors:
Daniel J. Koch, Mesa, AZ (US);
Jonathan H. Hammond, Scottsdale, AZ (US);
Daniel N. Koury, Jr., Mesa, AZ (US);
Jonathan F. Gorrell, Phoenix, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ;
U.S. Cl.
CPC ...
H01L 2/1302 ;
Abstract
A sensor has a support substrate (,), an electrode (,) movable relative to a surface (,) of the support substrate (,) and comprised of a first material, a structure (,) over a portion of the electrode (,) to limit mobility of the electrode (,) and comprised of a second material different from the first material, and bonding pads (,) outside a perimeter of the electrode (,) and comprised of the second material.