The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Jul. 10, 2000
Satoru Kusumoto, Yokohama, JP;
Ryoichi Oka, Yokohama, JP;
Megatorr Corporation, Yokohama, JP;
Abstract
Flow of processing gas is controlled by one valve from the atmospheric pressure to a substantial vacuum pressure. A valve body is disposed in a valve chamber having an inlet to be connected with a reaction chamber and an outlet to be connected with an evacuation pump. The valve body includes a first disc-shaped valve body portion to be pressed against a flange portion of a valve seat and a second disc-shaped valve body portion which is screwed on an end surface of the first valve body portion and adjusted its alignment. The second valve body portion is inserted into a valve hole of the valve seat. The first valve body portion has a circular groove at one of its surfaces to be brought into contact with the flange portion and an O-ring in the groove so as to choke fluid flow when in contact with the valve seat. The second valve body portion has tapered notches of which depths are gradually decreased from downstream to upstream. As the second valve body portion slides in the valve seat, each gap between the notches and the valve seat changes to vary a cross-sectional area of fluid passage. Back and forth movements of the valve body portion provide any state among open, minimum flow control and closed states.