The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Sep. 21, 2000
Toko Konishi, Tokyo, JP;
Cozy Ban, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor workpiece cleaning apparatus comprises a cleaning means of a semiconductor workpiece by use of cleaning liquid, charging means of drying liquid, and discharging means of the cleaning liquid. The cleaning means cleans the workpiece by spraying chemical liquid and/or pure water in a chamber, and/or by immersing the workpiece in the chemical liquid and/or pure water. The charging means takes in drying chemical liquid or vapor into contact with the processing chemical liquid or pure water in which the semiconductor workpiece is immersed. The discharging means discharges the processing chemical liquid or pure water interfaced by the processing chemical liquid or pure water.