The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Apr. 27, 1998
Applicant:
Inventors:
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01J 1/908 ; C23C 1/600 ;
U.S. Cl.
CPC ...
B01J 1/908 ; C23C 1/600 ;
Abstract
Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.