The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Sep. 09, 1999
Applicant:
Inventor:
Michel Puech, Metz Tessy, FR;
Assignee:
Alcatel, Paris, FR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F03D 5/00 ;
U.S. Cl.
CPC ...
F03D 5/00 ;
Abstract
In the invention, deposits that disturb electrical discharges between the rotor and the stator inside a turbomolecular pump with a plurality of stages on magnetic or gas bearings are prevented from forming by injecting an active gas at at least one suitable location inside the pump via at least one gas intake pipe, which active gas reacts with the deposit-generating molecules and forms gaseous compounds that are removed by the pump. Such deposits are thus prevented from forming without disturbing the conductance of the pump or adversely affecting the atmosphere present in the enclosure to which the pump is connected.