The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Jul. 07, 1998
Applicant:
Inventors:
James Platt Munroe, Allentown, PA (US);
Richard Linton Samsal, Chandler, AZ (US);
Bruce Herman Greenawald, Schneckville, PA (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01F 3/00 ; B01F 3/22 ; B01F 1/504 ;
U.S. Cl.
CPC ...
B01F 3/00 ; B01F 3/22 ; B01F 1/504 ;
Abstract
The present invention is an apparatus and process for blending high purity chemicals to produce a high purity chemical mixture with circulation, purification and sensing of said chemical mixture between blending of said high purity chemicals and storage of said high purity chemicals for use, ultimately to produce a high purity chemical mixture for on-site use in treating semiconductor materials, such as at a semiconductor fabrication facility that processes silicon wafers.