The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2001
Filed:
Apr. 05, 2000
Applicant:
Inventors:
Mark J. Beck, Los Gatos, CA (US);
Richard B. Vennerbeck, San Jose, CA (US);
Assignee:
Product Systems Incorporated, Campbell, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/104 ;
U.S. Cl.
CPC ...
H01L 4/104 ;
Abstract
A megasonic cleaning system comprised of a container, a resonator, a piezoelectric crystal and an indium layer for attaching the resonator to the piezoelectric crystal. The container includes a fluid chamber for holding a volume of cleaning solution. The resonator is selected from the group consisting of sapphire, quartz, silicon carbide, silicon nitride and ceramic. The resonator forms the bottom of the container and has an interface surface which abuts the fluid chamber.
Beck, Mark. (2001). Chemically inert megasonic transducer system (U.S. Patent No. 6222305). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6222305
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile