The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2001
Filed:
Jun. 21, 1999
Marsbed Hablanian, Wellesley, MA (US);
Varian, Inc., Palo Alto, CA (US);
Abstract
A vacuum pump, such as a turbomolecular pump, a molecular drag pump or a hybrid pump, is adapted for use with a backing pump. The vacuum pump includes a housing having an inlet port and an exhaust port for coupling to the backing pump, one or more vacuum pumping stages disposed in the housing, each of the vacuum pumping stages having a stationary member and a rotating member, and a gas turbine. The gas turbine includes a gas inlet, a gas outlet coupled to the exhaust port, and a rotor coupled to the rotating members of the vacuum pumping stages. A gas flow, produced by the backing pump, through the gas turbine causes the rotor and the rotating members of the vacuum pumping stages to rotate, wherein gas is pumped by the vacuum pumping stages from the inlet port to the exhaust port.