The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2001
Filed:
Feb. 19, 1999
Applicant:
Inventors:
Adolfo O. Gutierrez, Troy, NY (US);
Daniel M. Edmans, Socorro, NM (US);
Christopher Cormeau, San Diego, CA (US);
Assignee:
InterScience, Inc., Troy, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 1/513 ;
U.S. Cl.
CPC ...
G01P 1/513 ;
Abstract
This invention relates to an apparatus for making highly sensitive differential measurements of acceleration. The vibration sensor includes the use of moveable gate field effect transistors to sense the motion of a cantilever beam relative to the motion sensed by a reference structure, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.