The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Aug. 21, 1998
Applicant:
Inventors:
Assignee:
Bridgestone Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 3/5565 ;
U.S. Cl.
CPC ...
C04B 3/5565 ;
Abstract
A sputtering target disk is provided which is comprised of a sintered silicon carbide having a density of 2.9 g/cm,or more and obtained by sintering a uniform mixture of a powder of silicon carbide and a nonmetallic auxiliary sintering agent. The sputtering target disk is advantageously used in a sputtering treatment to form thin films with high purity which are suitable for use in various parts of electronic devices. The sputtering target disk exhibits excellent mechanical properties, electric properties, and durability against uneven wear.