The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Feb. 26, 1999
Christopher Lee Pike, Fremont, CA (US);
Advanced Micro Devices, Sunnyvale, CA (US);
Abstract
An improved particle-collecting cup using a fabrication protective device for use in processing semiconductor wafers includes a deflective surface, a protective shield and a protective lip to protect the surface of the semiconductor. The deflective surface encircles the semiconductor and extends both above and below the semiconductor at an inclined angle. The radius of the opening formed by the upper end of the deflective surface is at least as small as the radius of the semiconductor. The protective shield extends downward toward the semiconductor and the protective lip is inclined outward. Any particles spun off from the fluid coating of the semiconductor that may have been reflected are guided away from the surface of the semiconductor by the semiconductor fabrication extended particle collection cup.