The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Jul. 09, 1999
Applicant:
Inventor:
Gee Sun Hoey, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 2/118 ; B24B 3/300 ; B24B 4/726 ;
U.S. Cl.
CPC ...
B24B 2/118 ; B24B 3/300 ; B24B 4/726 ;
Abstract
A conditioner head to condition the polishing surface of a polishing pad includes a disk having an abrasive surface to contact a polishing pad. A disk holder carries the disk and holds it in contact with the polishing pad. The disk holder has a generally flat mounting surface. A drive element rotates the disk about an axis.