The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Jan. 06, 2000
Applicant:
Inventors:
Tomoyuki Kobayashi, Tokyo, JP;
Junji Takehara, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H47F 5/00 ; B25J 1/508 ;
U.S. Cl.
CPC ...
H47F 5/00 ; B25J 1/508 ;
Abstract
A wafer holding hand of the present invention is constituted so that two fixed clamps (,) and one movable clamp (,) are provided on a finger (,). The movable clamp (,) is supported by a plate spring (,) via a clamp holder (,), and the plate spring (,) is fixed to the slider (,). The slider (,) is driven by an air cylinder (,). The fixed clamp (,) is hook shaped, and the movable clamp (,) is drum shaped. A wafer W is held at three points by the movable clamp (,) and the two fixed clamps (,), and a force is applied to the movable clamp (,) by the plate spring (,) so as to hold the wafer W.