The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Nov. 03, 1998
Applicant:
Inventors:
Robert Pui Chi Fung, San Mateo, CA (US);
David Paul Musser, San Jose, CA (US);
Jonathan Sanghun Cho, Redwood City, CA (US);
Assignee:
Komag, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/04 ; B08B 7/04 ; C03C 2/300 ;
U.S. Cl.
CPC ...
B08B 3/04 ; B08B 7/04 ; C03C 2/300 ;
Abstract
A method for drying workpieces in accordance with our invention includes the step of immersing the workpieces in a liquid, holding the workpieces with a first holding mechanism, slowly draining the liquid from the container until a first portion of the workpieces is exposed and dried, holding the workpieces with a second holding means at the first portion, and draining the remainder of the liquid from the container. Because of this, a drying portion of the workpiece is not held by a wet holding mechanism.