The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Sep. 04, 1998
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A method for controlling preventative maintenance cycles in a semiconductor fabrication system includes automatically receiving, at a preventative maintenance module (PMM) in data communication with a host computer, operating parameter data from equipment in the system. Specification data corresponding to the equipment are retrieved by the PMM from a preventative maintenance cycle data base. It is determined whether the operating parameter data exceeds the specification data at the PMM. If the operating parameter data exceeds the specification data, then a key value of a variable ID corresponding to the equipment is changed, and an operating state of the equipment is modified by inserting the variable ID into an equipment control message and downloading the equipment control message to the equipment.