The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
May. 01, 1998
Guang Xuan Li, Gilbert, AZ (US);
Frank A. Shemansky, Jr., Phoenix, AZ (US);
Ronald James Gutteridge, Paradise Valley, AZ (US);
Daniel N. Koury, Jr., Mesa, AZ (US);
Zuoying Lisa Zhang, Gilbert, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A differential capacitor structure (,) formed overlying a substrate (,) having a middle layer (,) disposed between a lower layer (,) and an upper layer (,). The lower layer (,) is a static layer that is formed on the substrate (,), the middle layer (,) has a moveable component and is a dynamic layer attached to the substrate (,) using semi-circular tether supports (,), and the upper layer is a static layer that is anchored to the substrate (,). The semi-circular tether supports (,) are formed from a homogeneous material and provide structural stiffness to support the middle layer (,) in space and also provide stress relief.