The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Feb. 07, 2000
Applicant:
Inventors:
Marc Osajda, Toulouse, FR;
Eric Perraud, Tournefeuille, FR;
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A sensor device (,) comprises a sensor package (,) having a cavity (,) formed therein, a sensor die (,) mounted on a bottom surface (,) of the cavity (,) and a protective coating (,) formed over the sensor die in the cavity. The protective coating (,) is formed from a material, preferably a polymer material, which is arranged to have a graduated cross-linking density such that the material at the top of the cavity (,) has a high density of cross-linking and the material at the bottom of the cavity (,), which material is in contact with the sensor die, has a low density of cross-linking.