The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Nov. 03, 1998
William Dean Robertson, Waterloo, CA;
University of Waterloo, Waterloo, CA;
Abstract
A new method of forming mask ROM in the manufacture of an integrated circuit device has been achieved. A semiconductor substrate is provided with field oxide areas defined and a gate oxide layer overlying the semiconductor substrate. A gate electrode layer is deposited overlying the gate oxide layer. The gate electrode layer and the gate oxide layer are patterned to form gate electrodes. Ions are implanted to form source and drain junctions. A buffer layer is deposited overlying the gate electrodes, the source and drain junctions, and the field oxide areas. The buffer layer is etched down to expose the gate electrodes while leaving a protective thickness of the buffer layer overlying the source and drain junctions. Ions are implanted through the gate electrodes into the semiconductor substrate to selectively code the mask ROM devices and to complete the mask ROM devices in the manufacture of the semiconductor device. A coding mask controls the ion implantation to selectively code the mask ROM. The buffer layer prevents the ions from penetrating into the source and drain areas.