The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Aug. 27, 1999
Seong I. Kim, Northvale, NJ (US);
Innovac Corporation, Hoboken, NJ (US);
Abstract
An apparatus for processing wafers in the present invention includes first and second processing chambers isolated from each other, an isolation chamber coupled to each processing chamber, a single first type vacuum pump alternatively pumping down the first and second processing chambers through the isolation chamber, wherein the first type vacuum pump can pump down the first processing chamber when a wafer is loaded or unloaded in the second processing chamber, and the first type vacuum pump can pump down the second processing chamber when a wafer is loaded or unloaded in the first processing chamber, a wafer processing source chamber having a wafer processing source, the wafer processing source chamber being coupled to the first and second processing chambers and the isolation chamber, and a plurality of second type vacuum pumps coupled to the first and second processing chambers and the wafer processing source chamber.