The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2001
Filed:
Apr. 17, 1998
Yueh Yale Ma, Los Altos Hills, CA (US);
Other;
Abstract
In producing a metal-gate non-volatile memory cell, a layer of oxide is formed over a silicon substrate. A floating gate is then formed over the oxide. Source and drain regions are then formed in the silicon substrate such that at least one of the edges of the floating gate is aligned with its corresponding edge of one of the source and drain regions. A high temperature anneal cycle is then carried out to remove the defects in the source and drain regions. A composite layer of either Oxide-Nitride-Oxide-Polysilicon (ONOP) coupling dielectric or Oxide-Polysilicon (OP) coupling dielectric is then formed over the floating gate. Finally, a control gate made from metal is formed over the composite layer of ONOP or OP coupling dielectric.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile