The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2001
Filed:
Nov. 16, 1999
Applicant:
Inventors:
Rui Morimoto, Tokyo, JP;
Hiroki Honda, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ;
U.S. Cl.
CPC ...
H01L 2/120 ;
Abstract
The capacitor includes a first electrode which has a hollow structure formed by removal of a nitride film and which is formed from a conductive layer, and a second electrode which is formed from a conductive layer on the outside surface of the first electrode and on the surface of the hollow structure, while an insulating film is sandwiched between the first electrode and the second electrode. The capacitor prevents a short circuit from arising between a capacitor electrode and a wiring pattern in the proximity of the capacitor electrode in an oxide film serving as an interlayer insulating film.