The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2001
Filed:
Feb. 11, 1998
Applicant:
Inventors:
Patrick C. P. Cheung, Castro Valley, CA (US);
Andrew A. Berlin, San Jose, CA (US);
David K. Biegelsen, Portola Valley, CA (US);
Rachel King-Ha Lau, Fremont, CA (US);
Mark H. Yim, Palo Alto, CA (US);
Assignee:
Xerox Corporation, Stamford, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/118 ;
U.S. Cl.
CPC ...
B32B 3/118 ;
Abstract
Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the sandwiching layers by adhesive attachment to a target substrate.