The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Dec. 18, 1998
Thomas John Aton, Dallas, TX (US);
Leigh Ann Files, Richardson, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The improved method for microscopic measurement of electrical characteristics comprises a standard atomic force microscope (AFM). The AFM includes a pointed, conductively coated tip attached to one end of a softly compliant cantilever arm, also capable of conducting electricity. The other end of the cantilever arm is attached to the top of a piezo-electric z-axis driver which will raise and lower the cantilever arm as the AFM tip is scanned across the surface of a sample. A piezo-electric X-Y scanstage controller may also be provided and connected to the bottom of the z-axis driver. The X-Y scanstage is preferably capable of scanning the movement of the entire system including the Z-axis driver, cantilever arm and AFM tip.