The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Aug. 10, 1999
Dieter Haas, Bruchköbel, DE;
Wolfgang Buschbeck, Hanau, DE;
Jörg Krempel-Hesse, Eckartsborn, DE;
Leybold Systems GmbH, , DE;
Abstract
In a sputtering device with magnetic amplification, a magnetic field is generated by means of a permanent magnet system, whose lines of force run above and penetrate the sputtering surface, whereby the permanent magnet system is formed of two dosed, coaxial circular or oval rows (,) of individual magnets (,′ . . . ) that are connected via a yoke (,), whereby the surface of the target (,) that faces away from the rows of permanent magnets (,) is formed of two partial surfaces (,) that form an angle to each other and whereby the edge (,) that is formed by the two partial surfaces (,) runs parallel to the two rows (,) of permanent magnets (,′ . . . ) and whereby an insert (,) made of ferromagnetic material is inserted between the magnetic yoke (,) and the surface of the target (,) that faces the magnetic yoke (,).