The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Apr. 30, 1999
Applicant:
Inventors:
Assignee:
Leybold Systems GmbH, , DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract
Vacuum treatment system for application of thin layers onto substrates (,) with a transfer chamber (,) and several treatment chambers (,), said treatment chambers peripherally attached to the transfer chamber and being connected to said transfer chamber by means of a common opening (,) for inlet and outlet of substrate (,), and with a handling device (,) for transport of the substrate (,) between the treatment chambers (,), whereby the handling device (,) has at least one substrate holder (,) with one pivot and/or rotating retaining part to hold the substrates (,), by means of which the substrates (,) can pivot and/or rotate in the treatment chambers (,).