The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 2001

Filed:

Jul. 31, 1998
Applicant:
Inventors:

Akira Mase, Okazaki, JP;

Tomoyoshi Kushida, Seto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract

A side insulation layer is formed on a side wall of a gate electrode by oxidizing (or nitrizing) a substance of the gate electrode, so that the gate electrode is insulated from the semiconductor substrate with the side insulation layer and a gate insulation film. The gap between the gate electrode and the semiconductor substrate is greater around the side wall of the gate electrode than around the center thereof. The gap between the side wall of the gate electrode and the semiconductor substrate is densely filled with an insulating substance.


Find Patent Forward Citations

Mase, Akira. (2001). Insulated gate type semiconductor device and process for producing the device (U.S. Patent No. 6200868). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6200868

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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