The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2001
Filed:
Jul. 21, 1999
Applicant:
Inventor:
Geoffrey Dearnaley, San Antonio, TX (US);
Assignee:
Southwest Research Institute, San Antonio, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/414 ; C23C 1/424 ; C23C 1/448 ; C23C 1/638 ; C23C 1/634 ;
U.S. Cl.
CPC ...
C23C 1/414 ; C23C 1/424 ; C23C 1/448 ; C23C 1/638 ; C23C 1/634 ;
Abstract
A method of forming titanium boronitride coatings using ion beam assisted deposition. The method involves exposing the substrate to a vacuum, depositing titanium onto the substrate, substantially simultaneously exposing the substrate to a source comprising boron and nitrogen, and substantially simultaneously bombarding the substrate with an energetic beam of ions under conditions effective to form a quantity of titanium-boron bonds and a quantity of titanium-nitrogen bonds effective to produce a titanium boronitride coating having a hardness of at least about 5000 kg/mm,.