The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2001
Filed:
Jun. 30, 1999
Robert A. Maraschin, Cupertino, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Disclosed are inventive apparatuses and methods for interfacing ceramic and metal plasma reaction chamber components. The apparatuses include a clamp ring having a unitary plate having a plurality of attachment pad regions. The attachment pad regions are connected together with connecting regions which are relatively more deformable to thermal stresses than are the attachment pad regions. The clamp ring is attached to the ceramic plasma chamber utilizing a plurality of bolt tensioning assemblies having spring washers and indicator washers configured such that the correct torque value can be applied without the need of a torque wrench or other such tool.