The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2001
Filed:
Oct. 19, 1998
Kenichiro Arai, Shiga-ken, JP;
Hajime Shirakawa, Shiga-ken, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
A treating tank includes injection pipes for injecting a treating liquid. Each injection pipe has a closed distal end, and a plurality of jet bores arranged along a side wall thereof for jetting, into the treating tank, the treating liquid introduced through a proximal end. Each injection pipe includes a liquid jetting pipe portion defining the jet bores and having an inside diameter larger than a bore diameter of a liquid inlet formed at the proximal end for introducing the treating liquid into the liquid jetting pipe portion. This construction provides a uniform head length of the treating liquid jetting from the jet bores into the treating tank to effect uniform treatment of substrates in the treating tank. Where each injection pipe includes a sloping pipe portion having an inside diameter gradually increasing from the liquid inlet to the liquid jetting pipe portion, a higher degree of uniformity is achieved for the head length of the treating liquid jetting from the jet bores into the treating tank. Each jet bore may include a slope portion having an inside diameter gradually decreasing from an inner wall toward an outside of the liquid jetting pipe portion.