The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2001
Filed:
Feb. 01, 1999
Ralf Spitzl, D-53639 Konigswinter, DE;
Benedikt Aschermann, Wuppertal, DE;
Marko Walter, Ober-Ramstadt, DE;
Other;
Abstract
A device for the production of microwave plasmas with a microwave generator,and its coupling system to a waveguide resonator,which encloses a plasma chamber,is proposed, the short side of the cross-section of the resonator,lying parallel, facing the z axis, in the common wall with the chamber,and the microwave power being coupled from the resonator,into the chamber,via coupling points,in this short cross-sectional side. The coupling points are preferably formed as azimuthal slot couplers in the common wall of,and,The reference numbers relate to FIG.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile