The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2001
Filed:
May. 04, 1998
Applicant:
Inventor:
Helmut Roehle, Berlin, DE;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
G05D 1/620 ;
U.S. Cl.
CPC ...
G05D 1/620 ;
Abstract
Disclosed is a gas inlet device comprising a gas reservoir (,), which is connected via a supply line (,) via a supply flow restrictor (,) which can be closed by a supply valve,). The gas can be supplied into the antechamber (,) via a control valve (,) and a control flow restrictor (,). As the control valve (,) and the supply valve (,) close the antechamber from the outside, there are only minimal fluctuations in pressure during switching. By this means the pressure in the antechamber (,) can be controlled precisely and the gas flow from the antechamber (,) into the supply line (,) can be set with great precision.