The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2001
Filed:
Nov. 05, 1998
Applicant:
Inventors:
Dennis M. Adderton, Santa Barbara, CA (US);
Stephen C. Minne, Danville, IL (US);
Assignee:
Nanodevices, Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 ; G01B 7/34 ;
U.S. Cl.
CPC ...
G01B 5/28 ; G01B 7/34 ;
Abstract
Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.