The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Jan. 06, 2000
Applicant:
Inventor:
Michael Liehr, Feldatal, DE;
Assignee:
Leybold Systems GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 ; H05B 3/126 ;
U.S. Cl.
CPC ...
H01J 7/24 ; H05B 3/126 ;
Abstract
A device for producing plasma includes an isolating pipe formed of an isolating material, a rod-shaped conductor positioned inside of the pipe, the rod-shaped conductor having an inner diameter that is smaller than the diameter of the of the isolating pipe, and an inner alternating electromagnetic field source connected to a first end of the conductor. The device also includes a conductive pipe positioned inside of the isolating pipe and concentrically around the conductor, the conductive pipe being formed so as to partially enclose the conductor, and an outer alternating electromagnetic field source connected to a first end of the conductive pipe.