The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Feb. 02, 1999
Marsbed Hablanian, Wellesley, MA (US);
Varian Inc., Palo Alto, CA (US);
Abstract
A high-vacuum pump includes a first vacuum pump section and a second vacuum pump section coupled in series and having an interstage region between them. The vacuum pump further includes a housing containing the first and second vacuum pump sections. The housing includes a high conductance peripheral duct surrounding all or part of the interstage region and coupled to the interstage region. The housing defines a first inlet port coupled to an inlet of the first vacuum pump section, a second inlet port coupled to the peripheral duct, and an exhaust port coupled to an outlet of the second vacuum pump section. Examples of high-vacuum pumps according to the invention include turbomolecular vacuum pumps, diffusion pumps and mixed vacuum pumps which include both axial flow stages and molecular drag stages.